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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10266085
Filing Dt:
10/07/2002
Publication #:
Pub Dt:
07/17/2003
Inventors:
James F. Cameron, Gerhard Pohlers, Yasuhiro Suzuki
Title:
Cyclic sulfonium and sulfoxonium photoacid generators and photoresists comprising same
Assignment: 1
Reel/Frame:
013702/0247Recorded: 01/28/2003Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/02/2003
Exec Dt:
01/02/2003
Exec Dt:
01/02/2003
Assignee:
455 FOREST STREET
MARLBOROUGH, MASSACHUSETTS 01752
Correspondent:
EDWARDS & ANGELL, LLP
PETER F. CORLESS
POST OFFICE BOX 9169
BOSTON, MA 02209

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