Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/13/2004
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Application #:
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10294569
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Filing Dt:
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11/15/2002
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Publication #:
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Pub Dt:
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07/31/2003
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Inventors:
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Akira Katano, Yusuke Nakagawa, Kousuke Doi, Shinichi Kono
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Title:
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POSITIVE PHOTORESIST COMPOSITION AND METHOD OF PATTERNING RESIST THIN FILM FOR USE IN INCLINED IMPLANTATION PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 150, NAKAMARUKO, NAKAHARA-KU |
| KAWASAKI-SHI |
| KANAGAWA, JAPAN |
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| SUGHRUE MION, PLLC |
| 2100 PENNSYLVANIA AVENUE, N.W. |
| SUITE 800 |
| WASHINGTON, DC 20037-3213 |
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