Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/18/2004
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Application #:
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10166759
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Filing Dt:
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06/12/2002
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Publication #:
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Pub Dt:
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07/31/2003
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Inventors:
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Takaharu Kondo, Masafumi Sano, Akira Sakai, Tadashi Sawayama, Ryo Hayashi et al
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Title:
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SILICON-BASED FILM FORMATION PROCESS, SILICON-BASED FILM, SEMICONDUCTOR DEVICE, AND SILICON-BASED FILM FORMATION SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| JASON M. OKUN |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NY 10112-3801 |
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