Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/20/2004
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Application #:
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10054962
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Filing Dt:
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01/25/2002
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Publication #:
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Pub Dt:
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07/31/2003
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Inventors:
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Chun-Lien Su, Chi-Yuan Chin, Yih-Shi Lin, Shih-Keng Cho, Ming-Shang Chen
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Title:
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METHOD FOR CONTROLLING AND MONITORING A CHEMICAL MECHANICAL POLISHING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO.16 LI-HSIN ROAD |
| HSINCHU, TAIWAN R.O.C |
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| LOWE HAUPTMAN GILMAN & BERNER (22429) |
| BENJAMIN J. HAUPTMAN |
| 1700 DIAGONAL ROAD, SUITE 310 |
| ALEXANDRIA, VIRGINIA 22314 |
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