Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/23/2005
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Application #:
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10279320
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Filing Dt:
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10/23/2002
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Publication #:
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Pub Dt:
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08/07/2003
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Inventors:
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Meihua Shen, Yan Du, Nicolas Gani, Oranna Yauw, Hakeem M. Oluseyi
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Title:
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HIGH SELECTIVITY AND RESIDUE FREE PROCESS FOR METAL ON THIN DIELECTRIC GATE ETCH APPLICATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| P.O. BOX 450A |
| SANTA CLARA,, CA 95052 |
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