Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/31/2005
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Application #:
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10072620
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Filing Dt:
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02/08/2002
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Publication #:
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Pub Dt:
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08/14/2003
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Inventors:
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Takayuki Yamagishi, Masaei Suwada, Takeshi Watanabe
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Title:
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SEMICONDUCTOR PROCESSING APPARATUS COMPRISING CHAMBER PARTITIONED INTO REACTION AND TRANSFER SECTIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 23-1, 6 CHOME, NAGAYAMA TAMA-SHI |
| TOKYO 206-0025, JAPAN |
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| KNOBBE, MARTENS, OLSON ET AL. |
| GORDON H. OLSON |
| 620 NEWPORT CENTER DRIVE |
| 16TH FLOOR |
| NEWPORT BEACH, CA 92660 |
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