Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/31/2005
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Application #:
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10083254
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Filing Dt:
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02/27/2002
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Publication #:
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Pub Dt:
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08/28/2003
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Inventors:
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Shigeru Nakamoto, Hideaki Kondo, Juntaro Arima
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Title:
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SEMICONDUCTOR MANUFACTURING APPARATUS AND ITS DIAGNOSIS APPARATUS AND OPERATING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14, NISHI SHINBASHI, 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| MELVIN KRAUS |
| 1300 N. SEVENTEENTH ST. |
| STE. 1800 |
| ARLINGTON, VA 22209 |
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