Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/27/2005
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Application #:
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10379439
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Filing Dt:
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03/03/2003
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Publication #:
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Pub Dt:
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09/04/2003
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Inventors:
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Chang-Lin Hsieh, Diana Xiaobing Ma, Brian Sy Yuan Shieh, Gerald Zheyao Yin et al
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Title:
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SYSTEM LEVEL IN-SITU INTEGRATED DIELECTRIC ETCH PROCESS PARTICULARLY USEFUL FOR COPPER DUAL DAMASCENE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| JOSPEH BACH, PATENT COUNSEL |
| P.O. BOX 450A, M/S 2061 |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95052 |
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