Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/16/2004
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Application #:
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10344761
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Filing Dt:
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02/14/2003
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Publication #:
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Pub Dt:
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09/11/2003
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Inventors:
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Tadahiro Ohmi, Masaki Hirayama, Tetsuya Goto
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Title:
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MICROWAVE PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND MICROWAVE RADIATING MEMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107-8481, JAPAN |
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| 1-17-301, KOMEGAFUKURO 2-CHOME, AOBA-KU |
| SENDAI-SHI, MIYAGI 980-0813, JAPAN |
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| CROWELL & MORING, L.L.P. |
| HERBERT L. CANTOR |
| PO BOX 14300 |
| WASHINGTON, DC 20044-4300 |
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