Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10082010
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Filing Dt:
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02/22/2002
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Publication #:
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Pub Dt:
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09/11/2003
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Inventors:
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Rajiv K. Singh, Seung-Mahn Lee
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Title:
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Slurry and method for chemical mechanical polishing of metal structures including refractory metal based barrier layers
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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223 GRINTER HALL |
GAINESVILLE, FLORIDA 32611 |
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AKERMAN SENTERFITT |
GREGORY A. NELSON |
222 LAKEVIEW AVENUE, SUITE 400 |
WEST PALM BEACH, FLORIDA 33401 |
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