Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/16/2004
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Application #:
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10407434
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Filing Dt:
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04/07/2003
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Publication #:
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Pub Dt:
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09/11/2003
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Inventors:
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Kazuyuki Miyashita, Takashi Mikuchi
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Title:
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METHOD OF DETERMINING EXPOSURE CONDITIONS, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, AND STORAGE MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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