Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10396148
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Filing Dt:
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03/25/2003
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Publication #:
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Pub Dt:
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10/02/2003
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Inventors:
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Martin Weigert, Uwe Konietzka
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Title:
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Sputtering target for depositing silicon layers in their nitride or oxide form and process for its preparation
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| HERAEUSSTRASSE 12-14 |
| DE-63450 HANAU, GERMANY |
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| SMITH, GAMBRELL & RUSSELL, LLP |
| ROBERT G. WEILACHER |
| SUITE 3100, PROMENADE II |
| 1230 PEACHTREE ST, N.E. |
| ATLANA, GA 30309-3592 |
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