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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10393283
Filing Dt:
03/21/2003
Publication #:
Pub Dt:
10/02/2003
Inventors:
Masashi Kikuchi, Hitoshi Ikeda, Kiyoshi Kuwahara, Takaei Sasaki, Toshio Hayashi et al
Title:
High selective ratio and high and uniform plasma processing method and system
Assignment: 1
Reel/Frame:
013896/0476Recorded: 03/21/2003Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/07/2003
Exec Dt:
03/07/2003
Exec Dt:
03/07/2003
Exec Dt:
03/07/2003
Exec Dt:
03/07/2003
Exec Dt:
03/07/2003
Assignees:
2500 HAGISONO
CHIGASAKI-SHI, KANAGAWA, JAPAN
2804, TERAO
CHICHIBU-SHI, SAIYAMA, JAPAN
Correspondent:
LARSON & TAYLOR
ROSS F. HUNT
1199 FAIRFAX ST.
SUITE 900
ALEXANDRIA, VA 22314-1437

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