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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/26/2005
Application #:
10235453
Filing Dt:
09/04/2002
Publication #:
Pub Dt:
10/02/2003
Inventors:
Tom A. Kamp, Richard Gottscho, Steve Lee, Chris Lee, Yoko Yamaguchi, Vahid Vahedi et al
Title:
VARIABLE TEMPERATURE PROCESSES FOR TUNABLE ELECTROSTATIC CHUCK
Assignment: 1
Reel/Frame:
013271/0846Recorded: 09/04/2002Pages: 9
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/27/2002
Exec Dt:
08/27/2002
Exec Dt:
08/27/2002
Exec Dt:
08/28/2002
Exec Dt:
08/29/2002
Exec Dt:
08/29/2002
Exec Dt:
08/27/2002
Assignee:
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
THELEN REID & PRIEST LLP
P.O. BOX 640640
SAN JOSE, CA 95164-0640

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