Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10126919
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Filing Dt:
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04/19/2002
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Publication #:
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Pub Dt:
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10/23/2003
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Inventors:
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Chung J. Lee, Oanh Nguyen, Wei Shiang Lee, Michael Solomensky, Atul Kumar et al
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Title:
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Process modules for transport polymerization of low epsilon thin films
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 45500 NORTHPORT LOOP WEST |
| FREMONT, CALIFORNIA 94538 |
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| JACKSON WALKER L.L.P. |
| T. LING CHWANG |
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| SUITE 600 |
| RICHARDSON, TX 75080 |
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