Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/19/2005
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Application #:
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10422407
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Filing Dt:
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04/23/2003
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Publication #:
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Pub Dt:
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10/23/2003
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Inventor:
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Akio Yamada
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Title:
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ELECTRON BEAM EXPOSURE APPARATUS, ELECTRON BEAM EXPOSURE METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND ELECTRON BEAM SHAPE MEASURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1-32-1, ASAHI-CHO, NERIMA-KU |
TOKYO 179-0071, JAPAN |
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MORRISON & FOERSTER LLP |
DAVID L. FEHRMAN |
555 WEST FIFTH STREET |
SUITE 3500 |
LOS ANGELES, CA 90013-1024 |
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