Patent Assignment Abstract of Title
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Total Assignments:
4
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Patent #:
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Issue Dt:
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05/03/2005
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Application #:
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10127505
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Filing Dt:
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04/23/2002
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Publication #:
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Pub Dt:
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10/23/2003
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Inventors:
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James G. Tsacoyeanes, Scott D. Coston
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Title:
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SYSTEM AND METHOD FOR IMPROVING LINEWIDTH CONTROL IN A LITHOGRAPHY DEVICE BY VARYING THE ANGULAR DISTRIBUTION OF LIGHT IN AN ILLUMINATOR AS A FUNCTION OF FIELD POSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 77 DANBURY ROAD |
| WILTON, CONNECTICUT 06897 |
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| STERNE, KESSLER, GOLDSTEIN & FOX PLLC |
| C/O VIRGIL L. BEASTON |
| 1100 NEW YORK AVE., N.W., SUITE 600 |
| WASHINGTON, D.C. 20005-3934 |
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Assignment:
2
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| 1209 ORANGE STREET |
| WILMINGTON, DELAWARE 19801 |
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| STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
| 1100 NEW YORK AVE., NW |
| WASHINGTON, DC 20005 |
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Assignment:
3
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 8555 SOUTH RIVER PARKWAY |
| TEMPE, ARIZONA 85284 |
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| STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
| 1100 NEW YORK AVE., NW |
| WASHINGTON, DC 20005 |
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Assignment:
4
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 1110 |
| VELDHOVEN, NETHERLANDS 5503 LA |
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| STERNE, KESSLER, GOLDSTEIN & FOX PLLC |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005 |
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