Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/22/2006
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Application #:
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10418259
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Filing Dt:
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04/16/2003
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Publication #:
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Pub Dt:
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10/23/2003
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Inventors:
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Jose Tong, Eric H. Lenz
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Title:
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TECHNIQUES FOR REDUCING ARCING-RELATED DAMAGE IN A CLAMPING RING OF A PLASMA PROCESSING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| LAM RESEARCH CORPORATION |
| 4650 CUSHING PARKWAY CA-1 |
| FREMONT, CA 94538 |
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