Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/23/2007
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Application #:
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10430013
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Filing Dt:
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05/06/2003
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Publication #:
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Pub Dt:
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10/23/2003
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Inventors:
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Si Yi Li, S. M. Reza Sadjadi, James V. Tietz
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Title:
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PLASMA ETCHING OF SILICON CARBIDE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BURNS, DOANE, SWECKER & MATHIS, L.L.P. |
| PETER K. SKIFF, ESQ. |
| P.O. BOX 1404 |
| ALEXANDRIA, VA 22313-1450 |
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