Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09820748
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Filing Dt:
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03/30/2001
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Publication #:
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Pub Dt:
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11/06/2003
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Inventors:
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Takahiro Kitano, Yuji Matsuyama, Junichi Kitano
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Title:
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Substrate processing apparatus and substrate processing method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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TBS BROADCAST CENTER |
3-6, AKASAKA 5-CHOME, MINATO-KU |
TOKYO-TO 107-8481, JAPAN |
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OBLON, SPIVAK, MCCLELLAND, ET AL |
PAUL A. SACHER |
1940 DUKE STREET |
ALEXANDRIA, VIRGINIA 22314 |
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