Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10403269
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Filing Dt:
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03/31/2003
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Publication #:
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Pub Dt:
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11/13/2003
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Inventors:
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Ravikumar Ramachandran, Klaus Penner, Marion Nichterwitz, Christiane Nitschke et al
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Title:
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Etching composition and use thereof with feedback control of HF in BEOL clean
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ST.-MARTIN-STR. 53 |
MUNICH, GERMANY 81669 |
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HEATHER ROWLAND |
3000 CENTREGREEN WAY |
CARY, NC 27513 |
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05/10/2024 11:47 AM
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