Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/27/2004
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Application #:
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10141391
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Filing Dt:
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05/07/2002
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Publication #:
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Pub Dt:
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11/13/2003
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Inventors:
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Sudhir Gondhalekar, Dongqing Li, Alexander Veyster, Canfeng Lai, Zhengquan Tan et al
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Title:
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SUBSTRATE SUPPORT WITH EXTENDED RADIO FREQUENCY ELECTRODE UPPER SURFACE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT DEPARTMENT |
| P.O. BOX 450A, MS #2061 |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| PETER J. SGARBOSSA |
| P.O. BOX 450A, M/S 2061 |
| PATENT DEPT., PATENT COUNSEL |
| SANTA CLARA, CA 95052 |
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