Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10331063
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Filing Dt:
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12/30/2002
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Publication #:
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Pub Dt:
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11/20/2003
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Inventors:
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Sang Ick Lee, Hyung Hwan Kim
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Title:
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Method of forming flash memory device using a first polishing slurry having higher selectivity to oxide and a second slurry having higher selectivity to polysilicon
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SAN 136-1, AMI-RI, BUBAL-EUB |
| ICHON-SHI, KYOUNGKI-DO, KOREA, REPUBLIC OF 467-860 |
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| MARSHALL GERSTEIN & BORUN |
| MICHAEL R. HULL |
| 233 S. WACKER DRIVE |
| SUITE 6300, SEARS TOWER |
| CHICAGO, IL 60606-6357 |
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