Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/01/2005
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Application #:
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10319337
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Filing Dt:
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12/12/2002
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Publication #:
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Pub Dt:
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12/04/2003
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Inventor:
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Katsuhiko Murakami
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Title:
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HIGH-LUMINOSITY EUV-SOURCE DEVICES FOR USE IN EXTREME ULTRAVIOLET (SOFT X-RAY) LITHOGRAPHY SYSTEMS AND OTHER EUV OPTICAL SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3 MARUNOUCHI 3-CHOME CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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| KLARQUIST SPARKMAN LLP |
| DONALD L. STEPHENS JR. |
| ONE WORLD TRADE CENTER, SUITE 1600 |
| 121 S.W. SALMON STREET |
| PORTLAND, OR 97204-2988 |
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