Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/09/2005
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Application #:
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10414966
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Filing Dt:
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04/16/2003
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Publication #:
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Pub Dt:
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12/04/2003
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Inventors:
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Youichi Hirabayashi, Noriyoshi Matsumoto
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Title:
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PROJECTION EXPOSURE DEVICE AND POSITION ALIGNMENT DEVICE AND POSITION ALIGNMENT METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4-30 SHIBA KOUEN 3-CHOME, MINATO-KU |
TOKYO 105-0011, JAPAN |
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NIELDS & LEMACK |
KEVIN S. LEMACK |
176 EAST MAIN STREET |
WESTBOROUGH, MA 01581 |
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