Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/30/2004
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Application #:
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10165511
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Filing Dt:
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06/07/2002
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Publication #:
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Pub Dt:
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12/11/2003
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Inventors:
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Chung-Ho Huang, John A. Jensen
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Title:
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INTEGRATED STEPWISE STATISTICAL PROCESS CONTROL IN A PLASMA PROCESSING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| LAM RESEARCH CORPORATION |
| MICHAEL S. BRANDT |
| 4650 CUSHING PARKWAY |
| CA-1 |
| FREMONT, CA 94538 |
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