Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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01/25/2005
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Application #:
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10163477
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Filing Dt:
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06/05/2002
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Publication #:
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Pub Dt:
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12/11/2003
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Inventor:
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Michael Edward Malinowski
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Title:
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METHOD AND APPARATUS FOR DETECTING THE PRESENCE AND THICKNESS OF CARBON AND OXIDE LAYERS ON EUV REFLECTIVE SURFACES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2200 MISSION COLLEGE BLVD. |
| MS SCI-02 |
| SANTA CLARA, CALIFORNIA 95052-8119 |
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| DANDIA NATIONAL LABS |
| KURT C. OLSEN |
| P. O. BOX 969, MS 9031 |
| LIVERMORE, CA 94551-0969 |
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Assignment:
2
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| 1000 INDEPENDENCE AVENUE, S.W. |
| WASHINGTON, DISTRICT OF COLUMBIA 20585-0162 |
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| U.S. DEPARTMENT OF ENERGY |
| BRENDA K. BANKS |
| 1000 INDEPENDENCE AVENUE, S.W. |
| WASHINGTON, DC 20585-0162 |
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Assignment:
3
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 5800, MS-0161 |
| LEGAL TECHNOLOGY TRANSFER CENTER |
| ALBUQUERQUE, NEW MEXICO 87185 |
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| SANDIA NATIONAL LABORATORIES |
| P.O. BOX 5800, MS-0161 |
| ALBUQUERQUE, NM 87185-0161 |
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