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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/30/2005
Application #:
10464458
Filing Dt:
06/19/2003
Publication #:
Pub Dt:
12/25/2003
Inventor:
Takashi Fujita
Title:
POLISHING APPARATUS AND METHOD, AND WAFER EVACUATION PROGRAM
Assignment: 1
Reel/Frame:
014158/0653Recorded: 06/19/2003Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
06/12/2003
Assignee:
7-1, SHIMORENJAKU 9-CHOME
MITAKA-SHI, TOKYO, JAPAN
Correspondent:
DAVID S. SAFRAN
NIXON PEABODY LLP
8180 GREENSBORO DRIVE
SUITE 800
MCLEAN, VA 22102

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