Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10459194
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Filing Dt:
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06/11/2003
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Publication #:
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Pub Dt:
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01/15/2004
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Inventors:
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Judon Tony Pan, Michael D. Armacost, Hoiman Hung, Hongwen Li, Arulkumar Shanmugasundram et al
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Title:
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Integrated equipment set for forming a low K dielectric interconnect on a substrate
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 450A M/S #2061 |
PATENT DEPARTMENT |
SANTA CLARA, CALIFORNIA 95052 |
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APPLIED MATERIALS, INC. |
ROBERT W. MULCAHY |
P.O. BOX 450A M/S 2061 |
PATENT COUNSEL |
SANTA CLARA, CA 95052 |
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