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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
6851103
Issue Dt:
02/01/2005
Application #:
10395903
Filing Dt:
03/25/2003
Publication #:
20040010770
Pub Dt:
01/15/2004
Inventors:
Doug Van Den Broeke, Jang Fung Chen, Thomas Laidig, Kurt E. Wampler, Stephen Hsu
Title:
METHOD AND APPARATUS FOR DECOMPOSING SEMICONDUCTOR DEVICE PATTERNS INTO PHASE AND CHROME REGIONS FOR CHROMELESS PHASE LITHOGRAPHY
Assignment: 1
Reel/Frame:
014456/0578Recorded: 09/04/2003Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
VAN DEN BROEKE, DOUGLAS
Exec Dt:
08/25/2003
CHEN, JANG FUNG
Exec Dt:
08/20/2003
LAIDIG, THOMAS
Exec Dt:
08/21/2003
WAMPLER, KURT E.
Exec Dt:
08/21/2003
HSU, STEPHEN
Exec Dt:
08/20/2003
Assignee:
ASML MASKTOOLS, B.V.
DE RUN 6665
5504 DT VELDHOVEN, NETHERLANDS
Correspondent:
MCDERMOTT, WILL & EMERY
600 13TH STREET, N.W.
WASHINGTON, D.C. 20005-3096
Assignment: 2
Reel/Frame:
032170/0425Recorded: 02/07/2014Pages: 21
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
ASML MASKTOOLS B.V.
Exec Dt:
12/20/2013
Assignee:
ASML NETHERLANDS B.V.
DE RUN 6501
VELDHOVEN, NETHERLANDS NL-5504 DR
Correspondent:
PILLSBURY WINTHROP SHAW PITTMAN, LLP
P.O. BOX 10500
MCLEAN, VA 22102

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