Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10631303
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Filing Dt:
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07/29/2003
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Publication #:
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Pub Dt:
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02/05/2004
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Inventors:
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Jun Zhao, Farhad Moghadam, Tim Weidman, Rick J. Roberts, Hari Ponnekanti, Chau T. Nguyen et al
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Title:
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Process and an integrated tool for low k dielectric deposition including a pecvd capping module
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| PATENT COUNSEL |
| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A, M/S 2061 |
| SANTA CLARA, CA 95052 |
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