Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/05/2008
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Application #:
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10450149
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Filing Dt:
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06/11/2003
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Publication #:
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Pub Dt:
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02/12/2004
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Inventors:
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Naohisa Goto, Tadahiro Ohmi, Masaki Hirayama, Tetsuya Goto
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Title:
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MICROWAVE PLASMA PROCESSING APPARATUS, MICROWAVE PROCESSING METHOD AND MICROWAVE FEEDING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8-1, SHIROYAMATE 2-CHOME HACHIOJI-SHI, |
| TOKYO, JAPAN 193-0825 |
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| 1-17-301, KOMEGAFUKURO 2-CHOME, AOBA-KU SENDAI-SHI, |
| MIYAGI, JAPAN 980-0813 |
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| 3-6, AKASAKA 5-CHOME MINATO-KU, |
| TOKYO, JAPAN 107-8481 |
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| CROWELL & MORING, L.L.P. |
| HERBERT I. CANTOR |
| P.O. BOX 14300 |
| INTELLECTUAL PROPERTY GROUP |
| WASHINGTON, D.C. 20044-4300 |
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