Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10239657
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Filing Dt:
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09/24/2002
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Publication #:
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Pub Dt:
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02/12/2004
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Inventors:
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Osamu Yamabe, Junji Miyazaki, Takashi Kozeki, Shigeto Shigematsu, Hiroaki Nakagawa
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Title:
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Photomask unit, photomask device, projection exposure device, projection exposure method and semiconductor device
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 16-1, ONOGAWA, TSUKUBA-SHI |
| IBARAKI 305-0053, JAPAN |
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| 2-5, KASUMIGASEKI 3-CHOME |
| CHIYODA-KU, TOKYO 100-0013, JAPAN |
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| FOLEY & LARDNER |
| WILLIAM T. ELLIS |
| WASHINGTON HARBOUR |
| 3000 K STREET, N.W., SUITE 500 |
| WASHINGTON, D.C. 20007-5143 |
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