Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10219885
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Filing Dt:
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08/14/2002
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Publication #:
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Pub Dt:
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02/19/2004
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Inventors:
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Ajay Kumar, Anisul H. Khan, Dragan Podlesnik, Sharma V. Pamarthy, Axel Henke et al
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Title:
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METHOD FOR ETCHING HIGH-ASPECT-RATIO FEATURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| PATENT COUNSEL, M/S 2061 |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ST.-MARTIN-STR. 53 |
| 81669 MUNCHEN, GERMANY |
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| APPLIED MATERIALS, INC |
| ROBERT W. MULCAHY |
| P.O. BOX 450-A |
| PATENT COUNSEL, M/S 2061 |
| SANTA CLARA, CA 95052 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| GUSTAV-HEINEMANN-RING 212 |
| MUNICH, GERMANY 81739 |
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| JONATHAN BOCKMAN |
| C/O MORRISON & FOERSTER LLP |
| 1650 TYSONS BOULEVARD SUITE 400 |
| MCLEAN, VA 22102 |
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