Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10229076
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Filing Dt:
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08/28/2002
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Publication #:
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Pub Dt:
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03/04/2004
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Inventors:
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Manabu Edamura, Seiichiro Kanno, Tadamitsu Kanekiyo, Ryoji Nishio, Ken Yoshioka et al
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Title:
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PLASMA PROCESSING METHOD AND APPARATUS FOR ETCHING NON-VOLATILE MATERIAL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14, NISHI SHINBASHI 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| MELVIN KRAUS |
| 1300 NORTH SEVENTEENTH STREET |
| SUITE 1800 |
| ARLINGTON, VA 22209 |
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