Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/06/2004
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Application #:
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10241114
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Filing Dt:
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09/10/2002
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Publication #:
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Pub Dt:
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03/11/2004
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Inventors:
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Wei D. Wang, Praburam Gopalraja, Jianming Fu
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Title:
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MAGNETICALLY CONFINED METAL PLASMA SPUTTER SOURCE WITH MAGNETIC CONTROL OF ION AND NEUTRAL DENSITIES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95035 |
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| APPLIED MATERIALS, INC. |
| PATENT COUNSEL |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95035 |
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