Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10601826
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Filing Dt:
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06/23/2003
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Publication #:
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Pub Dt:
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03/18/2004
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Inventors:
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Robert Tolles, David P. Alvarez, Jeffrey G. Knirck, Leon Volfovski
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Title:
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Substrate scrubbing apparatus having stationary brush member in contact with edge bevel of rotating substrate
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPARTMENT- M/S 2061 |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| LEGAL AFFAIRS DEPARTMENT- M/S 2061 |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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