Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/29/2006
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Application #:
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10296614
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Filing Dt:
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11/26/2002
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Publication #:
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Pub Dt:
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03/18/2004
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Inventors:
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Tadahiro Ohmi, Masaki Hirayama, Shigetoshi Sugawa, Tetsuya Goto
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Title:
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PLASMA PROCESSING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-17-301, KOMEGAFUKURO 2-CHOME |
| AOBA-KU, SENDAI-SHI |
| MIYAGI 980-0813, JAPAN |
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| FINNEGAN HENDERSON FARABOW GARRETT & |
| DUNNER, LLP - MR. ERNEST F. CHAPMAN |
| 1300 I STREET, N.W. |
| WASHINGTON, DC 20005-3315 |
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