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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10380696
Filing Dt:
10/14/2003
Publication #:
Pub Dt:
03/18/2004
Inventors:
Hideki Kiryu, Tsuyoshi Takahashi, Shintaro Aoyama, Hiroshi Shinriki, Masanobu Igeta
Title:
Method for film formation of gate insulator, apparatus for film formation of gate insulator, and cluster tool
Assignment: 1
Reel/Frame:
014587/0444Recorded: 10/14/2003Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/11/2003
Exec Dt:
08/11/2003
Exec Dt:
08/11/2003
Exec Dt:
08/11/2003
Exec Dt:
08/11/2003
Assignee:
18-1-304, KAMITSURUMA 8-CHOME
SAGAMIHARA-SHI, KANAGAWA 228-0802, JAPAN
Correspondent:
CROWELL & MORING LLP
HERBERT I. CANTOR
INTELLECTUAL PROPERTY GROUP
P.O. BOX 14300
WASHINGTON, D.C. 20044-4300

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