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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10228655
Filing Dt:
08/27/2002
Publication #:
Pub Dt:
03/18/2004
Inventors:
Ali Shajii, David Tao, Mathias Koch, Douglas Brown, Hossein Zarrin
Title:
Apparatus for cooling a substrate through thermal conduction in the viscous regime
Assignment: 1
Reel/Frame:
013230/0739Recorded: 08/27/2002Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/25/2002
Exec Dt:
08/27/2002
Exec Dt:
08/27/2002
Exec Dt:
08/27/2002
Exec Dt:
08/27/2002
Assignee:
55 CHERRY HILL DRIVE
BEVERLY, MASSACHUSETTS 01915-1053
Correspondent:
ESCHWEILER & ASSOCIATES, LLC
THOMAS G. ESCHWEILER
629 EUCLID AVENUE, SUITE 1210
CLEVELAND, OHIO 44114

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