Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/31/2005
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Application #:
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10235988
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Filing Dt:
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09/04/2002
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Publication #:
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Pub Dt:
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03/25/2004
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Inventors:
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Jang Gyoo Yang, Daniel J. Hoffman, James D. Carducci, Gerardo A. Delgadino et al
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Title:
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CAPACITIVELY COUPLED PLASMA REACTOR WITH UNIFORM RADIAL DISTRIBUTION OF PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95035 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95035 |
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