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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
6822728
Issue Dt:
11/23/2004
Application #:
10667387
Filing Dt:
09/23/2003
Publication #:
20040057033
Pub Dt:
03/25/2004
Inventors:
Andrew W. McCullough, Gregg M. Gallatin
Title:
ILLUMINATION SYSTEM WITH SPATIALLY CONTROLLABLE PARTIAL COHERENCE COMPENSATION FOR LINE WIDTH VARIANCES IN A PHOTOLITHOGRAPHIC SYSTEM
Assignment: 1
Reel/Frame:
014484/0588Recorded: 04/08/2004Pages: 27
Conveyance:
CERTIFICATE OF OWNERSHIP AND MERGER, CONVERSION, MERGER, AND CONFIRMATORY ASSIGNMENT
Assignors:
SVG LITHOGRAPHY SYSTEMS, INC.
Exec Dt:
12/31/2001
ASML US, INC.
Exec Dt:
10/04/2002
ASM LITHOGRAPHY, INC. AND ASML US, LLC
Exec Dt:
12/31/2002
ASML US, INC.
Exec Dt:
10/09/2003
Assignees:
ASML US, INC.
8555 SOUTH RIVER PARKWAY
TEMPE, ARIZONA 85284
ASML US, LLC
1209 ORANGE STREET
WILMINGTON, DELAWARE 19801
ASML US, INC.
8555 SOUTH RIVER PARKWAY
TEMPE, ARIZONA 85284
ASML HOLDING N.V.
DE RUN 6501
VELDHOVEN, NETHERLANDS NL-5504 DR
Correspondent:
STERNE, KESSLER, GOLDSTEIN & FOX PLLC
1100 NEW YORK AVENUE, N.W.
WASHINGTON, DC 20005

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