Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10413141
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Filing Dt:
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04/15/2003
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Publication #:
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Pub Dt:
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04/01/2004
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Inventors:
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Natsuyo Morioka, Kenji Tamaki, Hideyuki Yamamoto, Akira Kagoshima, Daisuke Shiraishi et al
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Title:
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Etching system and etching method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14, NISHISHINBASHI 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| ALAN E. SCHIAVELLI |
| 1300 NORTH 17TH ST., SUITE 1800 |
| ARLINGTON, VA 22209 |
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