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Patent Assignment Abstract of Title
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Total Assignments: 3
Patent #:
Issue Dt:
04/05/2005
Application #:
10256377
Filing Dt:
09/27/2002
Publication #:
Pub Dt:
04/01/2004
Inventors:
Henry N. Chapman, John S. Taylor
Title:
ETCHED-MULTILAYER PHASE SHIFTING MASKS FOR EUV LITHOGRAPHY
Assignment: 1
Reel/Frame:
013345/0577Recorded: 09/27/2002Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/24/2002
Exec Dt:
09/24/2002
Assignee:
1111 FRANKLIN STREET
OAKLAND, CALIFORNIA 94607-5200
Correspondent:
JOHN P. WOOLDRIDGE
1334 RIDGESTONE COURT
LIVERMORE, CA 94551
Assignment: 2
Reel/Frame:
013769/0231Recorded: 02/05/2003Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
01/30/2003
Assignee:
C/O INTEL CORPORATION
SC1-2-B1, 3065 BOWERS AVE.
SANTA CLARA, CALIFORNIA 95052-8119
Correspondent:
LAWRENCE LIVERMORE NAT. LABORATORY
ALAN H. THOMPSON
BOX 808, L-703
LIVERMORE, CA 94551
Assignment: 3
Reel/Frame:
014222/0849Recorded: 07/01/2003Pages: 3
Conveyance:
CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
03/28/2003
Assignee:
P.O. BOX 808 (L-376)
LIVERMORE, CALIFORNIA 94550
Correspondent:
U.S. DEPARTMENT OF ENERGY
WILLIAM C. DAUBENSPECK
LAWRENCE LIVERMORE NATIONAL LABORATORY
P.O. BOX 808 (MS L-376)
LIVERMORE, CA 94550

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