Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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04/04/2006
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Application #:
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10256454
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Filing Dt:
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09/27/2002
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Publication #:
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Pub Dt:
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04/01/2004
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Inventors:
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Daniel G. Stearns, Donald W. Sweeney, Paul B. Mirkarimi, Anton Barty
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Title:
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METHOD FOR THE MANUFACTURE OF PHASE SHIFTING MASKS FOR EUV LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1111 FRANKLIN STREET |
| OAKLAND, CALIFORNIA 94607-5200 |
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| LAWRENCE LIVERMORE NAT. LABORATORY |
| ALAN H. THOMPSON |
| PATENT GROUP, L-703 |
| BOX 808, L-703 |
| LIVERMORE, CA 94551 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| C/O INTEL CORPORATION |
| 3065 BOWERS AVE., SCI-2-B1 |
| SANTA CLARA, CALIFORNIA 95052-8119 |
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| LAWRENCE LIVERMORE NAT. LABORATORY |
| ALAN H. THOMPSON |
| PATENT GROUP, L-703 |
| BOX 808, L-703 |
| LIVERMORE, CA 94551 |
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Assignment:
3
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 808 |
| LIVERMORE, CALIFORNIA 94550 |
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| U.S. DEPARTMENT OF ENERGY |
| WILLIAM C. DAUBENSPECK |
| P.O. BOX 808 |
| LIVERMORE, CA 94550 |
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