Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10255878
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Filing Dt:
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09/26/2002
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Publication #:
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Pub Dt:
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04/01/2004
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Inventors:
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Cyrus E. Tabery, Christopher F. Lyons, Srikanteswara Dakshina-Murthy
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Title:
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Post etch overlay metrology to avoid absorbing layers preventing measurements
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ONE AMD PLACE |
P.O. BOX 3453 |
SUNNYVALE, CALIFORNIA 94088-3453 |
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FOLEY & LARDNER |
MARCUS W. SPROW |
777 EAST WISCONSIN AVENUE |
MILWAUKEE, WISCONSIN 53202-5367 |
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