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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	6809827	Issue Dt:	10/26/2004	Application #:	10670028	Filing Dt:	09/25/2003
Publication #:	20040066518	Pub Dt:	04/08/2004
Inventor:	Justin L. Kreuzer
Title:	SELF REFERENCING MARK INDEPENDENT ALIGNMENT SENSOR

Assignment: 1

Reel/Frame:

Recorded: 04/08/2004

Pages: 27

Conveyance:

CERTIFICATE OF OWNERSHIP AND MERGER, CONVERSION, MERGER, AND CONFIRMATORY ASSIGNMENT

Assignors:

Exec Dt:

12/31/2001

Exec Dt:

10/04/2002

Exec Dt:

12/31/2002

Exec Dt:

10/09/2003

Assignees:

8555 SOUTH RIVER PARKWAY

TEMPE, ARIZONA 85284

1209 ORANGE STREET

WILMINGTON, DELAWARE 19801

8555 SOUTH RIVER PARKWAY

TEMPE, ARIZONA 85284

DE RUN 6501

VELDHOVEN, NETHERLANDS NL-5504 DR

Correspondent:

STERNE, KESSLER, GOLDSTEIN & FOX PLLC

1100 NEW YORK AVENUE, N.W.

WASHINGTON, DC 20005

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