Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10264985
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Filing Dt:
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10/04/2002
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Publication #:
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Pub Dt:
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04/08/2004
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Inventor:
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Grant Kenji Larsen
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Title:
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ELECTRODE CONFIGURATION FOR RETAINING COOLING GAS ON ELECTROSTATIC WAFER CLAMP
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| WOLF, GREENFIELD & SACKS, P.C. |
| WILLIAM R. MCCLELLAN |
| FEDERAL RESERVE PLAZA |
| 600 ALTANTIC AVENUE |
| BOSTON, MA 02210 |
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