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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
11/04/2008
Application #:
10682005
Filing Dt:
10/08/2003
Publication #:
Pub Dt:
04/15/2004
Inventors:
Masahiro Yoshida, Yasuhiro Chouno
Title:
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Assignment: 1
Reel/Frame:
014605/0629Recorded: 10/08/2003Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/06/2003
Exec Dt:
10/06/2003
Assignee:
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO-TO, JAPAN
Correspondent:
MORRISON & FOERSTER LLP
DAVID L. FEHRMAN
555 WEST FIFTH STREET
SUITE 3500
LOS ANGELES, CALIFORNIA 90013-1024

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