Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/26/2007
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Application #:
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10261839
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Filing Dt:
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09/30/2002
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Publication #:
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Pub Dt:
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04/15/2004
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Inventors:
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John M. de Larios, Mike Ravkin, Carl Woods, Fritz Redeker, James P. Garcia et al
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Title:
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METHOD AND APPARATUS FOR DRYING SEMICONDUCTOR WAFER SURFACES USING A PLURALITY OF INLETS AND OUTLETS HELD IN CLOSE PROXIMITY TO THE WAFER SURFACES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE & PENILLA, LLP |
| EDMUND H. MIZUMOTO, ESQ. |
| 710 LAKEWAY DRIVE, SUITE 170 |
| SUNNYVALE, CA 94085 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE & PENILLA, LLP |
| ALBERT S. PENILLA, ESQ. |
| 710 LAKEWAY DRIVE, SUITE 170 |
| SUNNYVALE, CA 94085 |
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